Research Output | Dar Al-hikmah Library | IIUM Only
This paper presents a novel design and analysis of capacitive radio frequency (RF) micro-electromechanical system (MEMS) switch. The RF-MEMS switch is actuated by electrostatic force with low-actuation voltage of 2.9V while it can be operated in a robust condition with maximum von Mises stress of 13.208 MPa which is less than aluminum’s yield str