Research Output | Dar Al-hikmah Library | IIUM Only
This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measurement and imaging of high aspect ratio nanopillars whe