Contents:Preface.Chapter 1: Overview of MEMS and Microsystems.1.1 MEMS and Microsystem.1.2 Typical MEMS and Microsystems Products.1.3 Evolution of Microfabrication.1.4 Microsystems and Microelectronics.1.5 The Multidisciplinary Nature of Microsystems Design and Manufacture.1.6 Microsystems and Miniaturization.1.7 Application of Microsyste